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Scaling issues and design of MEMS /

Baglio, Salvatore.

Scaling issues and design of MEMS / Salvatore Baglio ; Salvatore Castorina & Nicolo Savalli. - Chichester, West Sussex : John Wiley, c2007. - xiii, 229 p. : ill. ; 24 cm.

Includes references & index.

ISBN: 9780470016992 (hbk.)

LCCN: 2007037324

Subjects--Topical Terms:
Microelectromechanical systems--Design and construction.

LC Class. No.: TK7875 / .B34 2007

Dewey Class. No.: 620.5 / BAG

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