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Microlithography : process technlogy for IC fabrication /

Elliott, David J.

Microlithography : process technlogy for IC fabrication / David J. Elliott - New York : McGraw-Hill Book company, 1986

ISBN: 0070193045

Subjects--Topical Terms:
Integrated Circuits
Microlithnography
Photoresists

Dewey Class. No.: 621.38173 / ELL

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