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MEMS : applications /

MEMS : applications / edited by Mohamed Gad-el-Hak. - 2nd ed. - Boca Raton, FL : CRC Press/Taylor & Francis, 2006. - 1 v. (various pagings) : ill. ; 26 cm. - The MEMS handbook Mechanical engineering series .

Includes bibliographical references and index.

ISBN: 0849391393

Subjects--Topical Terms:
Detectors.
Microactuators.
Microelectromechanical systems.
Robots.

LC Class. No.: TK7875 / .M423 2005

Dewey Class. No.: 621.381 / MOH

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