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Handbook of optical metrology : principles and applications /

Handbook of optical metrology : principles and applications / edited by Toru Yoshizawa. - Boca Raton : CRC Press, c2009. - xiii, 730 p. : ill. ; 27 cm.

Includes bibliographical references and index.

ISBN: 9780849337604 (hbk.)

LCCN: 2008037129

Subjects--Topical Terms:
Metrology
Optical measurements

LC Class. No.: QC367 / .H36 2009

Dewey Class. No.: 681.25 / YOS

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