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Fundamentals of semiconductor fabrication /

May, Gary S.

Fundamentals of semiconductor fabrication / Gary S. May & Simon M. SZE. - New Delhi : Wiley, 2016. - xiii, 264 p. : ill. ; 24 cm.

Includes index.

ISBN: 9788126532605 (pbk.)

Subjects--Topical Terms:
Physics Semiconductor devices.

Dewey Class. No.: 537.622 / MAY

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