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An introduction to microelectromechanical systems engineering :

Maluf, Nadim.

An introduction to microelectromechanical systems engineering : Nadim Maluf, & Kirt Williams. - 2nd ed. - London : Artech House, c2004. - xx, 282 p, : ill. ; 24 cm.

Includes bibliography & index.

ISBN: 1580535909 (hbk)

Subjects--Topical Terms:
Microelectromechanical systems.

Dewey Class. No.: 621.38 / MAL

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