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Introductory MEMS : fabrication and applications /

Adams, Thomas M.

Introductory MEMS : fabrication and applications / Thomas M. Adams & Richard A. Layton. - New York : Springer, 2012. - xv, 444 p. : ill. ; 24 cm.

Includes appendixes ; glossary & references & index.

ISBN: 9788132206637 (pbk.)

Publisher. No.: 12102532

LCCN: 2009939153

Nat. Bib. No.: 08,N20,0973 dnb

Subjects--Topical Terms:
Microelectromechanical systems.
Electronic apparatus and appliances.
Transducers.
MEMS.

LC Class. No.: TK7875 / .A33 2010

Dewey Class. No.: 621.381 / ADA

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