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Emerging semiconductor technology : a symposium /

EME

Emerging semiconductor technology : a symposium / sponsored by ASTM Committee F-1 on Electronics, San Jose, CA, 28-31 Jan. 1986 ; Dinesh C. Gupta and Paul H. Langer, editors. - Philadelphia, PA : American Society for Testing and Materials, c1987. - 704 p. : ill. ;

Papers presented at the Fourth International Symposium on Semiconductor Processing. "ASTM publication code number (PCN) 04-960000-46."

Includes bibliographies and indexes.

ISBN: 9780803104594 (hbk.)

Subjects--Topical Terms:
Semiconductor industry
Semiconductors

Dewey Class. No.: 621.38152 / EME

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