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Ultraclean technology handbook / edited by Tadahiro Ohmi.

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Publication details: New York : M. Dekker, c1993.Description: v1, xvi, 928 p. : ill. ; 26 cmISBN:

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Item type	Current library	Call number	Materials specified	Status	Date due	Barcode
Books	USPCAS-W Seminar Library	670.42 OHM (Browse shelf(Opens below))		Available		LC-93680

Includes references and index.

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