Photonic MEMS devices : design, fabrication and control / Ai-Qun Liu ; co-authors, Xuming Zhang ... [et al.].
Series: Optical science and engineering series ; 136Publication details: Boca Raton, FL : CRC Press, c2009.Description: 483 p. : ill. ; 27 cmISBN:- 9781420045680 (hbk.)
- 621.381 LIU
- TK7875 .L477 2008
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Includes bibliographical references and index.
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