Baglio, Salvatore. <br/><br/>
Scaling issues and design of MEMS / 
Salvatore Baglio ; Salvatore Castorina & Nicolo Savalli. 
 - Chichester, West Sussex :  John Wiley,  c2007. 
 - xiii, 229 p. :  ill. ;  24 cm. 
<br/><br/>Includes references & index. 
<br/><br/><label>ISBN: </label>9780470016992 (hbk.) 
<br/><br/><label>LCCN: </label>2007037324 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems--Design and construction.
<br/><br/><label>LC Class. No.: </label>TK7875  / .B34 2007 
<br/><br/><label>Dewey Class. No.: </label>620.5  / BAG