TY  - GEN
AU  - Baglio,Salvatore
AU  - Castorina,Salvatore
AU  - Savalli,Nicolo
TI  - Scaling issues and design of MEMS
SN  - 9780470016992 (hbk.)
AV  - TK7875 .B34 2007
U1  - 620.5 
PY  - 2007///
CY  - Chichester, West Sussex
PB  - John Wiley
KW  - Microelectromechanical systems
KW  - Design and construction
N1  - Includes references & index
UR  - www.loc.gov/catdir/enhancements/fy0810/2007037324-t.html
ER  -