TY  - BOOK
AU  - SZE, S. M.
TI  - VLSI technology
SN  - 0071003479
U1  - 621.395 
PY  - 1988///
CY  - New York
PB  - McGraw-Hill international
KW  - Integrated Circuits
KW  - Integrated circuits--Very large scale integration
KW  - Scale Integration
ER  -