TY  - BOOK
AU  - Liu,Ai-Qun
TI  - Photonic MEMS devices: design, fabrication and control 
SN  - 9781420045680 (hbk.)
AV  - TK7875 .L477 2008
U1  - 621.381 
PY  - 2009///
CY  - Boca Raton, FL
PB  - CRC Press
KW  - Microelectromechanical systems
KW  - Photonics
N1  - Includes bibliographical references and index
UR  - http://www.loc.gov/catdir/enhancements/fy0903/2008301219-d.html
ER  -