Gupta, Dinesh C. <br/><br/>
Gate Dielectric integrity :  material, process, and tool qualification / 
Dinesh C. Gupta and George A. Brown 
 - West Conshohocken :  ASTM,  2000 
<br/><br/><label>ISBN: </label>0803126158 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Dielectrics<br/>Gate Array Circuits<br/>Integrated Circuits<br/>Semiconductors Wafers<br/>Silicon oxide films
<br/><br/><label>Dewey Class. No.: </label>621.38152  / GAT