TY  - BOOK
AU  - Gupta, Dinesh C.
TI  - Gate Dielectric integrity: material, process, and tool qualification 
SN  - 0803126158
U1  - 621.38152 
PY  - 2000///
CY  - West Conshohocken
PB  - ASTM
KW  - Dielectrics
KW  - Gate Array Circuits
KW  - Integrated Circuits
KW  - Semiconductors Wafers
KW  - Silicon oxide films
ER  -