Bean, K. E. <br/><br/>
Semiconductor Integrated circuit processing technology / 
W. R. Runyan and L. E. Bean 
 - Massachusetts :  Addison-Wesley publishing company,   1990 
<br/><br/><label>ISBN: </label>0201108313 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated Circuits<br/>Semiconductors
<br/><br/><label>Dewey Class. No.: </label>621.38173  / BEA