TY  - BOOK
AU  - Bean, K. E.
TI  - Semiconductor Integrated circuit processing technology
SN  - 0201108313
U1  - 621.38173 
PY  - 1990///
CY  - Massachusetts
PB  - Addison-Wesley publishing company, 
KW  - Integrated Circuits
KW  - Semiconductors
ER  -