TY  - GEN
AU  - Plummer,James D.
AU  - Deal,Michael D.
AU  - Griffin,Peter B.
TI  - Silicon VLSI technology: fundamentals, practice, and modeling 
SN  - 9788131726044 (pbk.)
AV  - TK7874.75 .P54 2000
U1  - 621.395 
PY  - 2009///
CY  - New Delhi
PB  - Prentice Hall
KW  - Integrated circuits
KW  - Metal oxide semiconductors
KW  - Silicon oxide films
N1  - Includes appendix & index
ER  -