Ultraclean technology handbook / 
edited by Tadahiro Ohmi. 
 - New York :  M. Dekker,  c1993. 
 - v1, xvi, 928 p. :  ill. ;  26 cm. 
<br/><br/>Includes references and index. 
<br/><br/><label>ISBN: </label>9780824787530 (hbk.) vol.1 
<br/><br/><label>LCCN: </label>93019413  
<br/><br/><label>Subjects--Topical Terms: </label><br/>Manufacturing processes.
<br/><br/><label>LC Class. No.: </label>TS183  / .U46  
<br/><br/><label>Dewey Class. No.: </label>670.42  / OHM