TY  - GEN
AU  - Ohmi,Tadahiro
TI  - Ultraclean technology handbook
SN  - 9780824787530 (hbk.) vol.1
AV  - TS183 .U46 
U1  - 670.42 
PY  - 1993///
CY  - New York
PB  - M. Dekker
KW  - Manufacturing processes
N1  - Includes references and index
ER  -