TY  - BOOK
AU  - Gatzen, Hans H.
AU  - Saile, Volker.
TI  - Micro and nano fabrication: tools and processes 
SN  - 9783662443941 (hbk.)
U1  - 620.5 
PY  - 2015///
CY  - London
PB  - Springer
KW  - Microelectromechanical systems
N1  - Includes references and index
ER  -