Handbook of semiconductor manufacturing technology / 
edited by Robert Doering, Yoshio Nishi. 
 - 2nd ed. 
 - Boca Raton :  CRC Press,  c2008. 
 - 1 v. (various pagings) :  ill. ;  27 cm. 
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>9781574446753 (hbk.) 
<br/><br/><label>LCCN: </label>2006102599 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductor industry<br/>Semiconductors
<br/><br/><label>LC Class. No.: </label>TK7871.85  / .H3335 2008 
<br/><br/><label>Dewey Class. No.: </label>621.38152  / DOE