TY  - GEN
AU  - Doering,Robert
AU  - Nishi,Yoshio
TI  - Handbook of semiconductor manufacturing technology
SN  - 9781574446753 (hbk.)
AV  - TK7871.85 .H3335 2008
U1  - 621.38152 22
PY  - 2008///
CY  - Boca Raton
PB  - CRC Press
KW  - Semiconductor industry
KW  - Semiconductors
N1  - Includes bibliographical references and index
ER  -