TY - GEN AU - Uchino, Kenji TI - FEM and micromechatronics with ATILA software SN - 9781420058789 U1 - 621 PY - 2008/// CY - Boca Raton PB - CRC Press KW - Mechatronics KW - Microelectromechanical systems N1 - Includes glossary ; references & index ER -