May, Gary S. <br/><br/>
Fundamentals of semiconductor fabrication / 
Gary S. May & Simon M. SZE. 
 - New Delhi :  Wiley,  2016. 
 - xiii, 264 p. :  ill. ;  24 cm. 
<br/><br/>Includes index. 
<br/><br/><label>ISBN: </label>9788126532605 (pbk.) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Physics Semiconductor devices.
<br/><br/><label>Dewey Class. No.: </label>537.622  / MAY