TY  - GEN
AU  - May, Gary S.
TI  - Fundamentals of semiconductor fabrication
SN  - 9788126532605 (pbk.)
U1  - 537.622 
PY  - 2016///
CY  - New Delhi
PB  - Wiley
KW  - Physics Semiconductor devices
N1  - Includes index
ER  -