Microfabrication and nanomanufacturing / 
edited by Mark J. Jackson. 
 - Boca Raton, FL :  CRC/Taylor & Francis,  c2006. 
 - 401 p. :  ill. ;  27 cm. 
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>9780824724313 (hbk.) 
<br/><br/><label>LCCN: </label>2005049275 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits.<br/>Microelectromechanical systems.<br/>Microelectronics.<br/>Nanomanufacturing.
<br/><br/><label>LC Class. No.: </label>TK7836  / .M523 2006 
<br/><br/><label>Dewey Class. No.: </label>620.5  / JAC