Maluf, Nadim. <br/><br/>
An introduction to microelectromechanical systems engineering : 
Nadim Maluf, & Kirt Williams. 
 - 2nd ed. 
 - London :   Artech House,   c2004. 
 - xx, 282 p, :  ill. ;  24 cm. 
<br/><br/>Includes bibliography & index. 
<br/><br/><label>ISBN: </label>1580535909 (hbk) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.
<br/><br/><label>Dewey Class. No.: </label>621.38  / MAL