TY  - BOOK
AU  - Maluf, Nadim.
TI  - An introduction to microelectromechanical systems engineering
SN  - 1580535909 (hbk)
U1  - 621.38 
PY  - 2004///
CY  - London : 
PB  - Artech House, 
KW  - Microelectromechanical systems
N1  - Includes bibliography & index
ER  -