00655nam a2200181   450000500170000002000210001708200160003810000180005424500990007225000120017126000380018330000330022150400350025465000360028994200070032595201240033299900170045620260506081244.0  a1580535909 (hbk)  a621.38bMAL  aMaluf, Nadim.  aAn introduction to microelectromechanical systems engineering :cNadim Maluf, & Kirt Williams.  a2nd ed.  aLondon : bArtech House, cc2004.  axx, 282 p, :bill. ;e24 cm.  aIncludes bibliography & index.  aMicroelectromechanical systems.  cBK  001040708ESaLCbLCd2026-04-22i22-4-26-FIZl0o621.381pLC-45749r2026-04-29 07:40:55tES-1333/C-1w2026-04-22yBK  c54494d54494