Adams, Thomas M. <br/><br/>
Introductory MEMS :  fabrication and applications / 
Thomas M. Adams & Richard A. Layton. 
 - New York :  Springer,  2012. 
 - xv, 444 p. :  ill. ;  24 cm. 
<br/><br/>Includes appendixes ; glossary & references & index. 
<br/><br/><label>ISBN: </label>9788132206637 (pbk.) 
<br/><br/><label>Publisher. No.: </label>12102532 
<br/><br/><label>LCCN: </label>2009939153 
<br/><br/><label>Nat. Bib. No.: </label>08,N20,0973  dnb 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.<br/>Electronic apparatus and appliances.<br/>Transducers.<br/>MEMS.
<br/><br/><label>LC Class. No.: </label>TK7875  / .A33 2010 
<br/><br/><label>Dewey Class. No.: </label>621.381  / ADA