00877cam a22002657a 4500 15943795 20260430073618.0 091014s2010 nyua b 001 0 eng d 2009939153 08,N20,0973 dnb 9788132206637 (pbk.) 12102532 TK7875 .A33 2010 621.381 ADA Adams, Thomas M. (Thomas McDaniel) Introductory MEMS : fabrication and applications / Thomas M. Adams & Richard A. Layton. New York : Springer, 2012. xv, 444 p. : ill. ; 24 cm. Includes appendixes ; glossary & references & index. Microelectromechanical systems. Electronic apparatus and appliances. Transducers. MEMS. swd Layton, Richard A. (Mechanical engineer) 0 0 0 0 BB BB 2019-11-01 0 621.381ADA 20912 2019-11-01 00:00:00 2019-11-01 BB 55118 55118