TY  - BOOK
AU  - Adams,Thomas M.
AU  - Layton,Richard A.
TI  - Introductory MEMS: fabrication and applications 
SN  - 9788132206637 (pbk.)
AV  - TK7875 .A33 2010
U1  - 621.381 
PY  - 2012///
CY  - New York
PB  - Springer
KW  - Microelectromechanical systems
KW  - Electronic apparatus and appliances
KW  - Transducers
KW  - MEMS
KW  - swd
N1  - Includes appendixes ; glossary & references & index
ER  -