00857nam a22002177a 4500 20260506062329.0 9780803104594 (hbk.) 621.38152 EME EME Emerging semiconductor technology : a symposium / sponsored by ASTM Committee F-1 on Electronics, San Jose, CA, 28-31 Jan. 1986 ; Dinesh C. Gupta and Paul H. Langer, editors. Philadelphia, PA : American Society for Testing and Materials, c1987. 704 p. : ill. ; Papers presented at the Fourth International Symposium on Semiconductor Processing. "ASTM publication code number (PCN) 04-960000-46." Includes bibliographies and indexes. Semiconductor industry Semiconductors Gupta, D. C. Langer, Paul H. BK 0 0 0 0 ES LC LC 2026-05-06 27-04-2026-MNK 0 621.38152 EME LC-41828 2026-05-06 06:24:16 ES-940 2026-05-06 BK 55513 55513