a symposium EME creator Gupta, D. C. Langer, Paul H. text Philadelphia, PA American Society for Testing and Materials c1987 monographic 704 p. : ill. ; sponsored by ASTM Committee F-1 on Electronics, San Jose, CA, 28-31 Jan. 1986 ; Dinesh C. Gupta and Paul H. Langer, editors. Papers presented at the Fourth International Symposium on Semiconductor Processing. "ASTM publication code number (PCN) 04-960000-46." Includes bibliographies and indexes. Semiconductor industry Semiconductors 621.38152 EME 9780803104594 (hbk.) 20260506062329.0