TY  - BOOK
AU  - Gad-el-Hak,Mohamed
TI  - MEMS: applications 
T2  - The MEMS handbook
SN  - 0849391393
AV  - TK7875 .M423 2005
U1  - 621.381 
PY  - 2006///
CY  - Boca Raton, FL
PB  - CRC Press/Taylor & Francis
KW  - Detectors
KW  - Microactuators
KW  - Microelectromechanical systems
KW  - Robots
N1  - Includes bibliographical references and index
ER  -