Handbook of optical metrology :  principles and applications / 
edited by Toru Yoshizawa. 
 - Boca Raton :  CRC Press,  c2009. 
 - xiii, 730 p. :  ill. ;  27 cm. 
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>9780849337604 (hbk.) 
<br/><br/><label>LCCN: </label>2008037129 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Metrology<br/>Optical measurements
<br/><br/><label>LC Class. No.: </label>QC367  / .H36 2009 
<br/><br/><label>Dewey Class. No.: </label>681.25  / YOS