TY  - BOOK
AU  - Yoshizawa,Tōru
TI  - Handbook of optical metrology: principles and applications 
SN  - 9780849337604 (hbk.)
AV  - QC367 .H36 2009
U1  - 681.25 22
PY  - 2009///
CY  - Boca Raton
PB  - CRC Press
KW  - Metrology
KW  - Optical measurements
N1  - Includes bibliographical references and index
ER  -