000 01240cam a22003377a 4500
001 15554017
003 MUET Library
005 20240911061304.0
008 081212s2009 flua b 001 0 eng d
010 _a 2008301219
015 _aGBA8B7636
_2bnb
016 7 _a013807776
_2Uk
020 _a9781420045680 (hbk.)
035 _a(OCoLC)ocn150381346
040 _aBTCTA
_cBTCTA
_dBAKER
_dYDXCP
_dBWX
_dOCLCQ
_dUKM
_dCDX
_dDLC
042 _alccopycat
050 0 0 _aTK7875
_b.L477 2008
082 0 4 _a621.381
_bLIU
100 1 _aLiu, Ai-Qun.
245 1 0 _aPhotonic MEMS devices :
_bdesign, fabrication and control /
_cAi-Qun Liu ; co-authors, Xuming Zhang ... [et al.].
260 _aBoca Raton, FL :
_bCRC Press,
_cc2009.
300 _a483 p. :
_bill. ;
_c27 cm.
440 0 _aOptical science and engineering series ;
_v136
504 _aIncludes bibliographical references and index.
650 0 _aMicroelectromechanical systems.
650 0 _aPhotonics.
856 4 2 _3Publisher description
_uhttp://www.loc.gov/catdir/enhancements/fy0903/2008301219-d.html
906 _a7
_bcbc
_ccopycat
_d2
_encip
_f20
_gy-gencatlg
942 _2ddc
_cBK
999 _c12197
_d12197