| 000 | 00613nam a2200181Ia 4500 | ||
|---|---|---|---|
| 005 | 20240911061350.0 | ||
| 008 | 190613s9999 xx 000 0 und d | ||
| 020 | _a0803126158 | ||
| 082 |
_a621.38152 _bGAT |
||
| 100 |
_aGupta, Dinesh C. _92360 |
||
| 245 | 0 |
_aGate Dielectric integrity : _bmaterial, process, and tool qualification / _cDinesh C. Gupta and George A. Brown |
|
| 260 |
_aWest Conshohocken : _bASTM, _c2000 |
||
| 650 |
_aDielectrics _92362 |
||
| 650 |
_aGate Array Circuits _92363 |
||
| 650 |
_aIntegrated Circuits _92364 |
||
| 650 |
_aSemiconductors Wafers _92365 |
||
| 650 |
_aSilicon oxide films _92361 |
||
| 999 |
_c13311 _d13311 |
||