000 00613nam a2200181Ia 4500
005 20240911061350.0
008 190613s9999 xx 000 0 und d
020 _a0803126158
082 _a621.38152
_bGAT
100 _aGupta, Dinesh C.
_92360
245 0 _aGate Dielectric integrity :
_bmaterial, process, and tool qualification /
_cDinesh C. Gupta and George A. Brown
260 _aWest Conshohocken :
_bASTM,
_c2000
650 _aDielectrics
_92362
650 _aGate Array Circuits
_92363
650 _aIntegrated Circuits
_92364
650 _aSemiconductors Wafers
_92365
650 _aSilicon oxide films
_92361
999 _c13311
_d13311