| 000 | 00484nam a2200145Ia 4500 | ||
|---|---|---|---|
| 005 | 20240911061351.0 | ||
| 008 | 190613s9999 xx 000 0 und d | ||
| 020 | _a0201108313 | ||
| 082 |
_a621.38173 _bBEA |
||
| 100 |
_aBean, K. E. _92382 |
||
| 245 | 0 |
_aSemiconductor Integrated circuit processing technology / _cW. R. Runyan and L. E. Bean |
|
| 260 |
_aMassachusetts : _bAddison-Wesley publishing company, _c1990 |
||
| 650 |
_aIntegrated Circuits _92383 |
||
| 650 |
_aSemiconductors _9818 |
||
| 999 |
_c13321 _d13321 |
||