| 000 | 006110000a22002050004500 | ||
|---|---|---|---|
| 001 | 4414824 | ||
| 005 | 20240911061455.0 | ||
| 008 | 930331m19939999nyua b 001 0 eng | ||
| 010 | _a 93019413 | ||
| 020 | _a9780824787530 (hbk.) vol.1 | ||
| 035 | _9(DLC) 93019413 | ||
| 050 | 0 | 0 |
_aTS183 _b.U46 |
| 082 | 0 | 0 |
_a670.42 _bOHM |
| 245 | 0 | 0 |
_aUltraclean technology handbook / _cedited by Tadahiro Ohmi. |
| 260 |
_aNew York : _bM. Dekker, _cc1993. |
||
| 300 |
_av1, xvi, 928 p. : _bill. ; _c26 cm. |
||
| 504 | _aIncludes references and index. | ||
| 650 | 0 | _aManufacturing processes. | |
| 700 | 1 | _aOhmi, Tadahiro. | |
| 999 |
_c14403 _d14403 |
||