| 000 | 00521nam a22001697a 4500 | ||
|---|---|---|---|
| 005 | 20240911061719.0 | ||
| 008 | 190701b ||||| |||| 00| 0 eng d | ||
| 020 | _a9788126532605 (pbk.) | ||
| 082 |
_a537.622 _bMAY |
||
| 100 |
_aMay, Gary S. _91570 |
||
| 245 |
_aFundamentals of semiconductor fabrication / _cGary S. May & Simon M. SZE. |
||
| 260 |
_aNew Delhi : _bWiley, _c2016. |
||
| 300 |
_axiii, 264 p. : _bill. ; _c24 cm. |
||
| 504 | _aIncludes index. | ||
| 650 |
_aPhysics Semiconductor devices. _95676 |
||
| 942 | _cBK | ||
| 999 |
_c17785 _d17785 |
||