| 000 | 007340000a22002290004500 | ||
|---|---|---|---|
| 005 | 20251028083525.0 | ||
| 008 | 061219s2008 flua bf 001 0 eng | ||
| 010 | _a 2006102599 | ||
| 020 | _a9781574446753 (hbk.) | ||
| 050 | 0 | 0 |
_aTK7871.85 _b.H3335 2008 |
| 082 | 0 | 0 |
_a621.38152 _222 _bDOE |
| 245 | 0 | 0 |
_aHandbook of semiconductor manufacturing technology / _cedited by Robert Doering, Yoshio Nishi. |
| 250 | _a2nd ed. | ||
| 260 |
_aBoca Raton : _bCRC Press, _cc2008. |
||
| 300 |
_a1 v. (various pagings) : _bill. ; _c27 cm. |
||
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 | _aSemiconductor industry | |
| 650 | 0 | _aSemiconductors | |
| 700 | 1 | _aDoering, Robert, | |
| 700 | 1 | _aNishi, Yoshio, | |
| 942 | _cREF | ||
| 999 |
_c36913 _d36913 |
||