000			00519nam a2200169 4500
005			20260506081244.0
020			_a1580535909 (hbk)
082			_a621.38 _bMAL
100			_aMaluf, Nadim.
245			_aAn introduction to microelectromechanical systems engineering : _cNadim Maluf, & Kirt Williams.
250			_a2nd ed.
260			_aLondon : _bArtech House, _cc2004.
300			_axx, 282 p, : _bill. ; _e24 cm.
504			_aIncludes bibliography & index.
650			_aMicroelectromechanical systems.
942			_cBK
999			_c54494 _d54494