| 000 | 00877cam a22002657a 4500 | ||
|---|---|---|---|
| 001 | 15943795 | ||
| 005 | 20260430073618.0 | ||
| 008 | 091014s2010 nyua b 001 0 eng d | ||
| 010 | _a 2009939153 | ||
| 015 |
_a08,N20,0973 _2dnb |
||
| 020 | _a9788132206637 (pbk.) | ||
| 028 | 5 | 2 | _a12102532 |
| 050 | 0 | 0 |
_aTK7875 _b.A33 2010 |
| 082 | 0 | 4 |
_a621.381 _bADA |
| 100 | 1 |
_aAdams, Thomas M. _q(Thomas McDaniel) |
|
| 245 | 1 | 0 |
_aIntroductory MEMS : _bfabrication and applications / _cThomas M. Adams & Richard A. Layton. |
| 260 |
_aNew York : _bSpringer, _c2012. |
||
| 300 |
_axv, 444 p. : _bill. ; _c24 cm. |
||
| 504 | _aIncludes appendixes ; glossary & references & index. | ||
| 650 | 0 | _aMicroelectromechanical systems. | |
| 650 | 0 | _aElectronic apparatus and appliances. | |
| 650 | 0 | _aTransducers. | |
| 650 | 0 | 7 |
_aMEMS. _2swd |
| 700 | 1 |
_aLayton, Richard A. _c(Mechanical engineer) |
|
| 999 |
_c55118 _d55118 |
||