| 000 | 00857nam a22002177a 4500 | ||
|---|---|---|---|
| 005 | 20260506062329.0 | ||
| 020 | _a9780803104594 (hbk.) | ||
| 082 | 0 | 0 |
_a621.38152 _b EME |
| 100 | _aEME | ||
| 245 | 0 | 0 |
_aEmerging semiconductor technology : _ba symposium / _csponsored by ASTM Committee F-1 on Electronics, San Jose, CA, 28-31 Jan. 1986 ; Dinesh C. Gupta and Paul H. Langer, editors. |
| 260 |
_aPhiladelphia, PA : _bAmerican Society for Testing and Materials, _cc1987. |
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| 300 |
_a704 p. : _bill. ; |
||
| 500 | _aPapers presented at the Fourth International Symposium on Semiconductor Processing. | ||
| 500 | _a"ASTM publication code number (PCN) 04-960000-46." | ||
| 504 | _aIncludes bibliographies and indexes. | ||
| 650 | 0 | _aSemiconductor industry | |
| 650 | 0 | _aSemiconductors | |
| 700 | 1 | _aGupta, D. C. | |
| 700 | 1 | _aLanger, Paul H. | |
| 942 | _cBK | ||
| 999 |
_c55513 _d55513 |
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