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Microlithography : process technlogy for IC fabrication / David J. Elliott

By: Material type: TextTextPublication details: New York : McGraw-Hill Book company, 1986ISBN:
  • 0070193045
Subject(s): DDC classification:
  • 621.38173 ELL
Item type:
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Holdings
Item type Current library Call number Materials specified Status Date due Barcode
Books Books Reference Collection 621.38173 ELL (Browse shelf(Opens below)) Available LC-37245/c1

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