Introductory MEMS : fabrication and applications / Thomas M. Adams & Richard A. Layton.

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Material type: Text

TextPublisher number: 12102532Publication details: New York : Springer, 2012.Description: xv, 444 p. : ill. ; 24 cmISBN:

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Item type	Current library	Call number	Materials specified	Status	Date due	Barcode
Book Bank	Book Bank Collection	621.381ADA (Browse shelf(Opens below))		Available		20912

Includes appendixes ; glossary & references & index.

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